The Micro-Electro-Mechanical Systems (MEMS) project is focused on the development of new MEMS-based sensors and actuators for measurement applications. The functions in a multidisiplinary environment with collaborations in the NIST laboratories in Chemistry, Materials Science, Physics, Biotechnology, and Building and Fire Research. Current activities in the project include thermal-based elements, mechanically resonant structures, microwave elements, and microfluidic systems. The project is also involved in developing MEMS test structures, test methods, and standards to characterize device properties for device performance and reliability testing. These MEMS-based test structures are also being utilized to characterize thin film properties in mainline semiconductor fabrication processes.

We are interested in post doctoral applications not only from individuals who have specialized in MEMS research but also from individuals of other science disciplines who wish to learn microfabrication methods and apply their expertise for new measurement applications.

(US Citizenship Required) [Contact: Michael Gaitan]