MicroElectroMechanical Systems (MEMS)

Selected Publications

A. Jahn, W. N. Vreeland, M. Gaitan, L. E. Locascio, "Controlled Vesicle Self-Assembly in Microfluidic Channels with Hydrodynamic Focusing," JACS 126, 2674-2675, 2004.

D. Reyes, E. Perruccio, B. Becerrs, L. Locascio, M. Gaitan, "Patterning Retinal Cells on Polyelectrolyte Multilayers," Proc. microTAS 2003 Conference, Lake Tahoe, CA, Oct 5-9, 2003.

T. Johnson, D. Ross, M. Gaitan, L. Locascio, "Laser modification of preformed polymer microchannels: Application to reduce band broadening around turns subject to electrokinetic flow," Anal. Chem., 73: (15) 3656-3661 AUG 1 2001.

D. Herman, M. Gaitan, D. DeVoe, "MEMS Test Structures for Mechanical Characterization of VLSI Thin Films," Proc. SEM Conference, Portland Oregon, June 4-6 2001.

S. Barker, D. Ross, M. Tarlov, M. Gaitan, L. Locascio, "Control of flow direction in microfluidic devices with polyelectrolyte multilayers," Anal. Chem., 72: (24) 5925-5929 DEC 15 2000.

L. E. Locascio and M. Gaitan, "Integrated Silicon Microheating Elements using Silicon-on-Plastic Drop-In Functionality," Proceeding microTAS 2000 Conference, Twente, The Netherlands, May 14-18, 2000.

J. Xu, L. Locascio, M. Gaitan, and C. S. Lee, "Room-Temperature Imprinting Method for Plastic Microchannel Fabrication," Anal. Chem 2000, 72, 1930-1933.

S. Smee, M. Gaitan, D. B. Novotny, Y. Joshi, and D. L. Blackburn, "IC Test Structurres for Multilayer Interconnect Stress Determination," IEEE Electron Device Letters, vol. 21, no. 1, January 2000.

V. Milanovic, E. Bowen, M. Zaghloul, N. Tea, J Suehle, B. Payne, and M. Gaitan, "Micromachined Connvective Accelerometers in Standard Integrated Circuits Technology," Applied Physics Letters, vol. 76, no. 4, January 2000.

S. Smee, M. Gaitan, and Y. Joshi, "MEMS-Based Test Structurres for IC Technology," Mechanical Behavior of Advanced Materials, ASME 98, Anaheim CA, Nov 15-20, 1998.

V. Milanovic, E. Bowen, N. Tea, J. Suehle, B. Payne, M. Zaghloul, and M. Gaitan, "Convection-based Accelerometer and Tilt Sensor Implemented in Standard CMOS," International Mechanical Engineering Conference and Exposition, MEMS Symposia ASME 98, Anaheim CA, Nov 15-20, 1998.

V. Milanovic, M. Ozgur, D. DeGroot, J. Jargon, and M. Zaghloul, "Characterization of Broad-Band Transmission for Coplanar Waveguides on CMOS Silicon Substrates," IEEE Trans MTT, vol 46, no 5, p.632-640, May 1998.

L. Martynova, L. Locascio, M. Gaitan, G. Kramer, R. Christensen, W. MacCrehan, "Fabrication of Plastic Microfluid Channels by Imprinting Methods," Anal. Chem., p.4783-4789, December 1997.

N. H. Tea, V. Milanovic, J. S. Suehle, M. Gaitan, M. E. Zaghloul, and Jon Geist, "Hybrid Post-processing Etching for CMOS-Compatible MEMS," IEEE/ASME Journal of Microelectromechanical Systems, vol. 6, no. 4, pp. 363-372, Dec. 1997.

V. Milanovic, M. Gaitan, E. Bowen, N. Tea, and M. Zaghloul, "Thermoelectric Power Sensor for Microwave Applications by Commercial CMOS Fabrication," IEEE Elec. Dev. Lett., vol 18, no 9, p.450-452, September 1997.

V. Milanovic, M. Gaitan, E. Bowen, and M. Zaghloul, "Micromachined Microwave Transmission Lines in CMOS Technology," IEEE Trans MTT, vol 45, no 5, p.630-635, May 1997.

Michael Gaitan, M. Parameswaran, R. Barry Johnson, and Ronald Chung, "Commercial CMOS Foundry Thermal Display," Proc. SPIE, vol. 1969, Orlando, FL, April 1993.

J. C. Marshall, M. Parameswaran, M. E. Zaghloul, and M. Gaitan, "High-Level CAD Melds Micromachined Devices with Foundries," IEEE Circuits and Devices, 8(6), pp. 10-17, November 1992.

J. Chang, A. Abidi, M. Gaitan, "Large Suspended Inductors on Silicon and Their Use in a 2-um CMOS RF Amplifier," IEEE Elec. Dev. Lett., vol 14, no 5, p. 246-248, May 1993.

J. S. Suehle, R. E. Cavicchi, M. Gaitan, and S. Semancik, "Tin Oxide Gas Sensor Fabricated Using Micro-Hotplates and In-Situ Processing," IEEE Elec. Dev. Lett., vol 14, no 3, p.118-120, March 1993.

M. Parameswaran, A. M. Robinson, D. L. Blackburn, M. Gaitan, and J. Geist, "Micromachined Thermal Radiation Emitter form a Commercial CMOS Process," IEEE EDL, 12(2), pp. 57-59, February 1991.


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Updated: 28 March 07