N. H. Tea, V. Milanovic, J. S. Suehle, M. Gaitan, M. E. Zaghloul, and Jon Geist, "Hybrid Post-processing Etching for CMOS-Compatible MEMS," IEEE/ASME Journal of Microelectromechanical Systems, vol. 6, no. 4, pp. 363-372, Dec. 1997.
Michael Gaitan, M. Parameswaran, R. Barry Johnson, and Ronald Chung, "Commercial CMOS Foundry Thermal Display," Proc. SPIE, vol. 1969, Orlando, FL, April 1993.